Porous Chuck

Porous Chuck

Porous Chuck


POWEL Corporation:
C-602/E-1005, Digital Empire B/D 1, 16, Deogyong-daero, 1556beon-gil, Yeongtong-gu, Suwon-si, Gyeonggi-do, Korea.16690 Tel: 031-206-2612~3 / Fax : 031-206-2614

It is widely used as basic materials in various industries such as filters, high-temperature refractories, high-temperature teeth, absorbent materials, sound absorption materials, lightweight structures, and insulation materials

Characteristic of Porous Carbon Chuck

  • Uniform pore size of less than 5 μm
  • Half the weight of aluminum
  • It has excellent conductivity and is effective in static electricity
  • You can match the size(Up to 2500mm)
  • Strong against particles
  • No static electricity

The purpose of Porous Carbon Chuck

  • Table for attaching wafer surface protective tape
  • Adsorption table for peeling off wafer surface protection tape
  • Adsorption table for wafer inspection equipment
  • The adsorption table of the UV irradiation device
  • Handling of wafer mounter device
  • Wafer cleaning device spinner head
  • TSV process
  • Dicing process
  • Background process