ESC Power Supply

ESC Power Supply

ESC Power Supply

POWEL Corporation:
C-602/E-1005, Digital Empire B/D 1, 16, Deogyong-daero, 1556beon-gil, Yeongtong-gu, Suwon-si, Gyeonggi-do, Korea.16690 Tel: 031-206-2612~3 / Fax : 031-206-2614

A power supply device of a core component recognition chuck that fixes the substrate to the lower electrode using the force of static electricity inside the vacuum chamber of semiconductor and LCD manufacturing equipment

ARC CONTROL

  • When ARC occurs during output, cut off and restart the output
  • Output blocking function in case of repeated ARC occurrence

Load discharge function

  • Output toggle function operation to discharge the load
  • Dechucking function can be set up(Auto Toggle waveform can be changed)